Oxford Instruments PlasmalabSystem100 - Fig 5: Electrical Connections

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 9 of 24 Issue 10: February 11
POWER DISTRIBUTION
UNIT
(REMOVABLE COVER)
COOLING
FAN
SKT 7 SKT 10A
SKT 9
SKT 17SKT 16SKT 8
PUMP
PURGE
HEATER/
CHILLER
SKT 10
EARTH TERMINAL
SYSTEM POWER
CABLE GLAND
(CABLE LENGTH
= 4 METRES)
LOW VOLTAGE
FUSES
SKT 7
AUXILIARY
EMERGENCY OFF
SWITCH CONNECTOR
4-WAY BICC
PIN A EMO 1*
PIN B +24V
PIN C 0V
PIN D EMO 2*
(NOTE: EMO 1 & 2
MUST BE LINKED)
*EMO = EMERGENCY
OFF
2 AMP
FS1
+15V -15V +24V
FS2 FS3
2 AMP 2 AMP
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO LOAD LOCK
ROTARY PUMP
SOCKET 10A
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO ROTARY
PUMP 2
SOCKET 9
12
3 4
PHASE 1
PHASE 2
PHASE 3
SUPPLY TO ROTARY
PUMP 1
SOCKET 10
1
2 E
SUPPLY TO ROTARY
PUMP OIL FILTER
SOCKET 17
415V
Pin 1 Live
Pin 2 Neutral
Pin E Earth
208V
Pin 1 Phase 1
Pin 2 Phase 2
Pin E Phase 3
Fig 5: Electrical connections