Oxford Instruments PlasmalabSystem100 - System Link Configuration Table

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 23 of 24 Issue 10: February 11
8.2.2 System Link Configuration Table
NAME
FUNCTION
NOTES
LK1
ANALOGUE 0V TO CHASSIS
LK2
DIGITAL 0V TO ANALOGUE 0V
LK3
NON – CONTROLLER CRYO ENABLE
LK4
HEATER SNAP SWITCH BYPASS
LK5
FIT IF NO OEM CONTROLLER
LK6 A/B
LK6A = NON PM140 ENDPOINT
LK6B = PM140 ENDPOINT
SEE LK7 A/B
LK7 A/B
LK7A = NON PM140 ENDPOINT
LK7B = PM140 ENDPOINT
SEE LK 6 A/B
LK8
+24V DC TO RL2 COM1
LK9
+24V DC TO RL2 COM2
LK10
+24V DC TO RL6 COM1
LK11
+24V DC TO RL6 COM2
LK12
+24V DC TO RL7 COM1
LK13
+24V DC TO RL7 COM2
LK14 A/B
LK14A = NON DRY PUMP FITTED
LK14B = DRY PUMP FITTED
LK15
PUMP CURRENT BYPASS
LK16
+24V DC TO RL8 COM2
LK17
NON – CONTROLLER HEATER
ALARM
LK18
NON – CONTROLLER HEATER
ENABLE
LK19
SPARE INT/LOCK 1 BYPASS
NOT FITTED 100/133
LK20
SPARE INT/LOCK 2 BYPASS
LK21 A/B
LK21A = PURGE SWITCH NOT
FITTED
LK21B = PURGE SWITCH FITTED
Table 3: System link configuration