Oxford Instruments PlasmalabSystem100 - Nitrogen Supply Specifications; Process Gas Inlet Requirements; Extraction System Requirements

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07 Page 15 of 24 Issue 10: February 11
5.5 Nitrogen requirement
Function
Connection
Parameter
Specification
System N
2
¼” stainless steel
Swagelok
Flow
8 lpm (0.32 cfm)
Pressure
3.0 Bar (45 psi)
minimum
Rotary pump purge
¼” stainless steel
Swagelok typically
Flow
Refer to sub-section
6.1 Rotary pump
purging
Pressure
Refer to sub-section
6.1 Rotary pump
purging
5.6 Process gas requirement
Function
Connection
Parameter
Specification
Process gas in
¼” stainless steel
welded pipe at gas
pod, ¼” stainless
steel VCR at
system.
Pressure
2.0 – 3.0 Bar (30 – 45
psi)
5.7 Extraction requirement
Function
Connection
Parameter
Specification
Gas pod
100mm (4”) tube
Flow
6-line gas pod – 1
m
3
/hour (0.6 cfm)
12-line gas pod – 3
m
3
/hour (1.8 cfm)
TEOS pod
100mm (4”) tube
Flow
1 m
3
/hour (0.6 cfm)
Rotary pump
exhaust
Refer to Section 6
Pump set
information