Oxford Instruments PlasmalabSystem100 - Fig 2: PECVD System Layout (2-Frame)

PlasmalabSystem100 Oxford Instruments Plasma Technology Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11 Page 6 of 24 Printed: 10-Feb-11, 9:07
1412
1090
747
550
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 2: PECVD system layout (2-frame)
NOTE: For services panel details, see Fig 4.