OpAL
Open Load Atomic Layer Deposition System
System Manual
Works Order No.:
94-417919
Customer: Università di Pisa
Typical
OpAL system
WARNING
THIS SYSTEM INCORPORATES POTENTIALLY DANGEROUS COMPONENTS, WHICH CAN EXPOSE
PERSONNEL TO HAZARDS RESULTING IN DEATH OR SERIOUS INJURY.
BEFORE ATTEMPTING TO INSTALL, POWER UP OR OPERATE THIS SYSTEM, EN
SURE YOU HAVE
READ AND UNDERSTOOD THE ENCLOSED SYSTEM MANUAL,
ESPECIALLY SECTION 1 (HEALTH
AND SAFETY).
Issue 1: July 2010
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