OpAL Oxford Instruments Plasma Technology System Manual
4.1 Introduction
The installation and cabling of this system is the responsibility of the customer (unless
this has been specifically altered in the sales contract). On completion of the system
installation, Oxford Instruments Plasma Technology (OIPT) will commission the system.
4.2 Installing the system
The following instructions are a general guide for installing a typical OpAL system,
supplied with a remote gas pod and rotary vane pump. Customers should be aware of any
special requirements for their specific system, e.g. internal gas lines, rotary pump
purging, hazardous processes, endpoint detectors etc..
For details of the services required, refer to the Installation Data Sheets and the Services
Specifications documents included in this manual as Appendices.
IMPORTANT: BEFORE INSTALLING THE SYSTEM, ENSURE THAT ALL PERSONNEL WHO WILL BE
INVOLVED HAVE READ AND UNDERSTOOD SECTION 1 ‘HEALTH AND SAFETY’ OF THIS
MANUAL.
4.2.1 Unpacking
Unpack system components and check for damage and missing items against the packing
list. If any items are damaged or missing, report immediately to the carrier and OIPT.
Installation and Commissioning
Issue 8: July 10 Page 4-2 of 8 Printed: 14 July 2010 08:27
To Next Page
