System Manual Oxford Instruments Plasma Technology OpAL
3.13.1 Water delivery
A water pot is located inside the top console. A pipe connects the pot outlet to the
process chamber. A pair of ALD fast valves provides delivery and purging of the line.
3.13.2 Precursor Cabinet
A maximum of three ALD precursors can be fitted inside the precursor cabinet. Fig 3-34
shows the arrangement of precursors inside the cabinet. The precursor source pots are
heated using dedicated heater jackets. Two MFCs can be locat
ed inside the precursor
cabinet.
Fig 3-34: Precursor arrangement inside cabinet
Description
Printed: 07 August 2009 07:42 Page 3-43 of 46 Issue 1: August 07
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