Oxford Instruments OpAL - Installation and commissioning; Introduction

System Manual Oxford Instruments Plasma Technology OpAL
4 Installation and commissioning
4
..Installation and commissioning............................................................................. 4-1
4.1 Introduction................................................................................................. 4-2
4.2 Installing the system .................................................................................... 4-2
4.2.1 Unpacking ...............................................................................................4-2
4.2.2 Positioning the system components.........................................................4-3
4.2.3 Connecting the services...........................................................................4-4
4.3 Commissioning the system .......................................................................... 4-6
4.4 System adjustments ..................................................................................... 4-7
4.4.1 Process pump purge................................................................................4-7
Fig 4-1: 3-phase supply cable c
onnections at the power box .......................................4-5
Installation and Commissioning
Printed: 14 July 2010 08:27 Page 4-1 of 8 Issue 8: July 10