Oxford Instruments OpAL - Table of Contents

OpAL Oxford Instruments Plasma Technology System Manual
Contents
Printed: 14 July 2010 08:52 Page (iii) Issue 1: July 2010
Contents
Title and inside front cover pages
Contents List.................................................................................................................(iii)
Preface..........................................................................................................................(iv)
Customer Support Facilities...........................................................................................(iv)
System Identification ......................................................................................................(v)
Quality Control Forms ...................................................................................................(vi)
Goods Return Form QCF 60
Certificate of Pre-Acceptance and Certificate of Acceptance QCF 61
System Readiness Form QCF 89
Declaration of Conformity QCF 185d
ASM Patent Rights
1. Health and Safety .................................................................................................. 1-1
2. Services (OpAL) ..................................................................................................... 2-1
3. Description ........................................................................................................... 3-1
4. Installation............................................................................................................ 4-1
5. Operating Instructions ......................................................................................... 5-1
6. Maintenance ......................................................................................................... 6-1
7. Troubleshooting ................................................................................................... 7-1
8. Process Guide and Glossary................................................................................... 8-1
9. Uninstallation and disposal ................................................................................... 9-1
Appendix A Measurement of radio frequency and microwave emissions
Appendix B Operation and maintenance of turbomolecular pumps
Appendix IDS Installation Data Sheets (OpAL)
Appendix PSP Precursor Source Pot
Appendix R Rotameter data
Appendix S Services Specifications for Plasmalab and Ionfab Systems
OIPT Automatch Unit Equipment Manual
Ozone Delivery System Equipment Manual