Oxford Instruments OpAL - Description; System Views

System Manual Oxford Instruments Plasma Technology OpAL
3.2.2 System views
The following illustrations show various views of the system.
Heat shield
Process Chamber
Control panel
EMO
Precursor Cabinet
Precursor bypass
valves control
Fig 3-2: System front view
Description
Printed: 07 August 2009 07:42 Page 3-5 of 46 Issue 1: August 07