ALD Ozone Delivery System Oxford Instruments Plasma Technology
Equipment Manual
DESCRIPTION
Printed: 14-Jul-10, 7:09
Page 3-4 of 6 Issue 01: July 10
If the ozone detector measures unsafe concentrations of ozone, it performs the following
actions:
E
lectrical power to the ozone generator is interrupted. This stops ozone production.
The compressed air supply to the cabinet is disabled. This closes the isolation and
ALD dose valves.
An alarm is displayed on the PC2000 pages on the FlexAL or OpAL system controller.
This stops the recipe that is running on the controller.
NOTE: Electrical power to the ozone generator remains off, even if ozone concentrations
return to safe levels.
3.4 Functional description of the ozone delivery system
Figure 3-2 shows a functional diagram of the ozone delivery system.
Figure 3-2: Functional diagram of the ozone delivery system
When the ozone delivery system is not in use, the three pneumatic valves are closed. This
minimises the risk of oxygen leaking from the system.
When the oxygen input valve opens, oxygen enters the ozone generator. Some of the ozone
produced by the ozone generator passes through the isolation valve into the ozone
destruction system. This converts ozone into oxygen, which then passes into the facility
exhaust. When the ALD rapid dose valve is open, ozone also passes through a needle valve
into the ALD process chamber.
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