Oxford Instruments OpAL - General

System Manual Oxford Instruments Plasma Technology OpAL
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
6.2 General
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE
IT NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
6.2.1 Weekly
1) Examine the exterior of the machine for damage or signs of overheating and for failed
indicator lamps.
2) Examine the service connections of the machine for signs of fluid leaks or loose electrical
connectors.
3) Check the functionality of the vacuum switch interlock switch, as described in the following
steps:
a) Select the Pumping page on the PC2000 application.
b) Vent the process chamber.
c) Check that the Process Interlock field on the Pumping page displays the
message “Fault”.
d) Evacuate the process chamber.
e) Check that the message in the Process Interlock field on the Pumping
page changes to “OK”.
f) If this test fails, stop using the system and contact your local OIPT office
for advice.
g) Examine the exterior of the machine for damage or signs of overheating
and for failed indicator lamps.
4) Note, in the machine’s log book, the time taken for the machine to pump down from
atmosphere to a standard pressure. An increase in this time may indicate a leak, a decrease
in pumping efficiency, a change in a vacuum gauge or in a vacuum valve.
6.2.2 Monthly
1) Check the functionality of the interlock chain, as described in the following
steps:
a) Access the interlock chain terminals as described in section 3.4.
b) Connect a digital voltmeter, set to a suitable DC voltage range, to the
interlock chain terminals.
c) Toggle each interlock in turn to check operation of the associated contacts.
d) If any interlock fails, shut down the system and do not operate it. Contact
OIPT technical support for instructions.
Maintenance
Printed: 14-Jul-10, 8:14 Page 6-3 of 16 Issue 4: July 10