Health and Safety Oxford Instruments Plasma Technology Plasmalab and Ionfab
Health and Safety
Printed:06 April 2010, 09:32 Page 1-9 of 24 Issue 18: April 2010
1.4.6 Gases
Gases are used in the system for venting and purging (N2), for aiding heat transfer (e.g. helium
and for establishing the process environment (i.e. proc
)
ess gases).
s
esigned.
he hazards presented by gases fall into one or more of the following categories:
fficulties and eventually death.
g.
ric – can ignite spontaneously on contact with air.
) Corrosive
responsibility to be aware of the hazards and take the necessary precautions. Contact your gas
ull details.
Process gases used in the system are specified dependent on the process for which the system i
d
T
a) Asphyxiant - replaces Oxygen causing respiration di
b) Flammable - can ignite in the presence of heat or arcin
c) Pyropho
d) Toxic
e
The following WARNINGS may be applicable to the gases used in your system; it is your
supplier for f
WARNING
LAMMABLE GASES - FLAMMABLE MATF ERIAL CAN IGNITE IN THE PRESENCE OF HEAT
cess chamber must be subjected to at least one vent cycle
fore removing or loosening components.
al protective equipment as necessary.
OR ARCING, CAUSING SEVERE INJURY.
fter a processing run, the proA
before any maintenance work is carried out.
Ensure that the gas lines have been purged be
Wear person
WARNING
TOXIC GASES - CONTACT CAN CAUSE DEATH OR SERIOUS INJURY
fter a processing run, the proA cess chamber must be subjected to at least two vent cycles
fore removing or loosening components.
al protective equipment as necessary.
before any maintenance work is carried out.
Ensure that the gas lines have been purged be
Wear person
WARNING
CORROSIVE GASES - CONTACT CAN CAUSE SERIOUS INJURY
fter a processing run, the proA cess chamber must be subjected to at least two vent cycles
fore removing or loosening components.
e equipment as necessary.
before any maintenance work is carried out.
Ensure that the gas lines have been purged be
Wear personal protectiv
WARNING
LASMALAB and IONFAB SYSTEMS DO NOT PROVIDEP ANY EXCESS PRESSURE
tion, in
d external to
REGULATION / PROTECTION FOR PROCESS GASES.
I is the customer’s responsibility to ensure that suitable regulation / protect
accordance with all applicable standards, is installed and correctly maintaine
the system.
1.4.6.1 The effluents of all Plasmalab and Ionfab systems should be considered toxic.
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