Health and Safety Oxford Instruments Plasma Technology Plasmalab and Ionfab
Health and Safety
Printed:06 April 2010, 09:32 Page 1-11 of 24 Issue 18: April 2010
1.4.7 Precursor materials
Precursors used in the system are specified dependent on the process for which the system is
esigned.
he hazards presented by precursors fall into one or more of the following categories:
ficulties and eventually death.
g.
ric – can ignite spontaneously on contact with air.
) Corrosive
bility to be aware of the hazards and take the necessary precautions. Contact your
precursor supplier for full details.
d
T
a) Asphyxiant - replaces oxygen causing respiration dif
b) Flammable - can ignite in the presence of heat or arcin
c) Pyropho
d) Toxic
e
The following WARNINGS may be applicable to the precursors used in your system; it is your
responsi
WARNING
FLAMMABLE PRECURSORS - FLAMMABLE MATERIAL CAN IGNITE IN THE PRESENCE OF
EAT OR ARCING, CAUSING SEVERE INJURY. H
After a processing run, the pro
efore any maintenance work is carried out.
cess chamber must be subjected to at least one vent cycle
nsure that the precursor lines have been purged before removing or loosening
al protective equipment as necessary.
b
E
components.
Wear person
WARNING
TOXIC PRECURSORS - CONTACT CAN CAUSE DEATH OR SERIOUS INJURY
fter a processing run, the proA cess chamber must be subjected to at least two vent cycles
ged before removing or loosening
before any maintenance work is carried out.
Ensure that the precursor lines have been pur
components.
Wear personal protective equipment as necessary.
WARNING
ORROSIVE PRECURSORS - CC ONTACT CAN CAUSE SERIOUS INJURY
cycles
ing or loosening
ear pers uipment as necessary.
After a processing run, the process chamber must be subjected to at least two vent
efore any maintenance work is carried out. b
nsure that the precursor lines have been purged before removE
components.
onal protective eqW
.4.7.1 Perform a risk assessment and wear suitable personal protective equipment when 1
1.4.7.2
ed.
working on pre-cursor systems.
The effluents of all OpAL and FlexAL systems should be considered toxic.
1.4.7.3 Ensure that effluents are extracted into a safe disposal system. The bore of the
extraction pipework must be of a greater internal bore than the pump outlet. Exhaust
lines carrying hazardous gases must not be used for any other purpose.
1.4.7.4 Rotary and turbomolecular pumps MUST always be nitrogen ballasted, if this feature is
provided on the system. If a flow switch and alarm are needed on any of these lines to
ensure safe operation, they must be installed and regularly maintain
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