OpAL Oxford Instruments Plasma Technology System Manual
3.8 Lower Electrode
The lower electrode is shown in Fig 3-26. The electrode is grounded inside the chamber.
A flange with allowance for the electrode heater legs and thermocouple leg is fitted to the
underside of the chamber. The flange may be water cooled to provide protection to the
‘O’ ring seals. Cooling is achieved by water flowing in channels within the flange.
Lower Electrode
(400° C)
Thermocouple
Heater
legs
Mounting
bracket
(3-off)
Fig 3-26: Lower electrode
Description
Issue 1: August 07 Page 3-30 of 46 Printed: 07 August 2009 07:42
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