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Environmental Agency Producers Registration Number for WEEE: WEE/AE0116XU
Page 9 of 13
QCF89 issue 8
09/11/07
This form is provided in order for us to record the level of wo
The system should be installed, within the parameters listed be
signifies that you have completed the insta
Installation Data Document (Appendix IDS in
documents.
Should this form be received, an engineer
the right to
SYSTEM READINESS FORM
rk
that you have conducted, to support the installation of your new Oxford Instruments system.
low and the form returned to your supporting Oxford Instruments office. Returning this form
llation of the system, in accordance with the Services Specifications (Appendix S in this System Manual) the
this System Manual) and that the installation conforms with all of the requirements listed within these
dispatched to start commissioning and any of the fac
ilities requirements not be met, Oxford Instruments reserves
terminate that commissioning visit and charge the customer for a return visit, once the facilities have been fully completed.
Company Name :
Company Contact Name:
System Serial
Number :
System Type:
Please tick appropriate box YES NO Detail
1. Has the system been sited ? Attach site plan if available.
2. Has the system been installed in a clean room ?
3. Are there any special requirements for gaining access into the clean room
? ie. clearance, training, citizenship etc.. If so please list below.
4. Have pumps been sited and the cables between each pump and system
power box been connected?
5. Has the gas pod been sited, connected to the system and connected in to
the appropriate gas delivery and exhaust extraction systems, in accordance
with local safety regulations?
6. If the system has a heater chiller, has this been sited, connected to the
lower electrode cooling circuit and filled with Hexid A40?
7. Has AC power been connected to the system? Measure the voltages
between each phase and neutral.
Phase 1 to
Neutral
Phase 2 to
Neutral
Phase 3 to
Neutral
8. Has compressed air been connected to the system? Inlet pressure must
be 6 Bar (90PSI). Note Pressure.
Compressed Air Inlet Pressure
9. Has cooling water been connected to the system? Differential pressure Inlet Water Outlet Water
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