OpAL Oxford Instruments Plasma Technology Installation Data
1. Introduction
This installation specification document gives information about the OpAL (ALD) systems to
enable customers to prepare the required environment for the system.
Note that all dimensions shown in these data sheets are typical; precise dimensions
depend on the actual equipment fit. All dimensions are given in millimetres unless
otherwise stated.
Oxford Instruments Plasma Technology conducts a programme of continual product
development, and reserves the right to change the design and/or specification of
equipment without notice. The details contained in this document were correct at the
time of printing but should be confirmed immediately prior to delivery.
Installation Data
Issue 3: October 08 Page 4 of 22 Printed: 7-Aug-09, 8:03
To Next Page
Loading...
