OpAL Oxford Instruments Plasma Technology System Manual
Interface PCB
Hoist
control valves
Fig 3-11: Console left hand view showing hoist control valves
3.3 Hoist assembly
The hoist assembly, shown in Fig 3-12, raises and rotates the upper chamber to provide
access to the lower chamber and table for wafer handling. The hoist’s pneumatic circuit is
shown in Fig 3-13.
Description
Issue 1: August 07 Page 3-10 of 46 Printed: 07 August 2009 07:42
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