Oxford Instruments OpAL - Control PLC (ALD Valves)

System Manual Oxford Instruments Plasma Technology OpAL
3.4.3 Control PLC (ALD valves)
The control PLC, shown in Fig 3-15 provides control of the ALD valves. The PLC
incorporates a fast microprocessor.
CPU
PLC
Connector
CAN
Interface
Analogue
PCB
Compact
flash card
B&R Analogue output
card (two channels)
B&R Analogue input
card (four channels)
PLC Base
unit
Pc2003 Digital I/O
IDC
Fig 3-15: Control plc
Description
Printed: 07 August 2009 07:42 Page 3-15 of 46 Issue 1: August 07