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5.10.10.1
Buttons................................................................................................... 5-55
5.10.10.2 System setup timers panel.................................................................... 5-55
5.10.10.3 Process setup timers panel.................................................................... 5-55
5.10.10.4 RF Generator 1 tolerance panel ........................................................... 5-55
5.10.10.5 RF generator capacitor presets panel.................................................. 5-56
5.10.10.6 Gas tolerance panel............................................................................... 5-56
5.10.10.7 ICP generator tolerance panel ............................................................. 5-56
5.10.10.8 Chamber venting times panel .............................................................. 5-58
5.10.10.9 Heater tolerance panel......................................................................... 5-58
5.10.10.10 APC Tolerance panel............................................................................. 5-58
5.11 Log files........................................................................................................... 5-59
Fig 5-1: Controls and indicators............................................................................................... 5-3
Fig 5-2: Typical system alert ...................................................................................................5-15
Fig 5-3: PC 2000 screen header.............................................................................................. 5-17
Fig 5-4: Typical recipe page....................................................................................................5-23
Fig 5-5: Step Commands pop-up menu................................................................................. 5-25
Fig 5-6: Typical select Log page ............................................................................................. 5-27
Fig 5-7: Typical run log page.................................................................................................. 5-31
Fig 5-8: Typical leak detection and MFC calibration log page............................................ 5-32
Fig 5-9: N
2
Pressure regulator/gauge..................................................................................... 5-33
Fig 5-10: Typical Pump Control page..................................................................................... 5-35
Fig 5-11: Pump control page vacuum mimic......................................................................... 5-36
Fig 5-12: Pump control page operator interface.................................................................. 5-37
Fig 5-13: Service mode page .................................................................................................. 5-38
Fig 5-14: Heater Presets page ................................................................................................ 5-40
Fig 5-15: System Log page...................................................................................................... 5-42
Fig 5-16: Recipe page.............................................................................................................. 5-43
Fig 5-17: Typical production mode page............................................................................... 5-45
Fig 5-18: Chamber 1 process control page............................................................................ 5-46
Fig 5-19: Leak Detection page ............................................................................................... 5-51
Fig 5-20: Mass flow calibration page..................................................................................... 5-53
Fig 5-21: Process tolerances page.......................................................................................... 5-54
Operating Instructions
Generic (OpAL Plasma) Issue 1: Oct. 07 Page 5-2 of 60 Printed: 06 November 2007 09:42