Oxford Instruments OpAL - Fig 5-11: Pump Control Page Vacuum MIMIC

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The vacuum system mimic is shown in Fig 5-11.
PROCESS
CHAMBER
ROTARY VANE/DRY
PUMP
CM GAUGE
ISOLATING VALVE
GATE
VALVE
CHAMBER
VENT VALVE
Fig 5-11: Pump control page vacuum mimic
Valves are coloured Red when closed and Green when open. Running pumps are indicated by
animation.
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Operating Instructions
Generic (OpAL Plasma) Issue 1: Oct. 07 Page 5-36 of 60 Printed: 06 November 2007 09:42