System Manual Oxford Instruments Plasma Technology OpAL
3.13.4 Bubbler connections
Bubblers with fill up to 200g can be ordered. The precursor cabinet has been designed to
take precursor source pots of maximum height 165mm and 51mm diameter as shown in
Fig 3-35. Please state when ordering the bubbler that it is for an Oxford Instruments
machine and the manufacturer should be aware of OIPT’s bubbler specifications. Please
see Fig 3-35 for details of these connections.
Alternative connection arrangements may be accommodated but must be specified well in
advance.
Fig 3-35: Requirements for connecting bubblers
NOTE: For low vapour pressure compounds that will be heated above 80°C, please
remember to specify high temperature compatible manual valves
when
ordering a bubbler.
3.13.5 Precursor consumption
See Table 3-7 for recommended ordering quantities for precursors.
Quantity of precursor Recommended use
50g Researching a new material or developing a new
process and running a few samples for
measurements
100g Running 2-3 months of medium duty sample
work
200g Running 4-6 months of fairly intensive
processing
Table 3-7: Recommended precursor quantities
Description
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