OpAL Oxford Instruments Plasma Technology System Manual
3.10 System power supply
The Power Distribution Unit, shown in Fig 3-28, is located at the rear of the unit. It
houses circuit breakers and transformers (±15 volt DC and 24 volt DC supplies). The
main power supply cable gland and sockets for rotary pumps and auxiliary EMO
connection are mounted on the unit. Fuses for the 24 volt and ±15 volt supplies are also
accessible externally.
For circuit details, refer to the Power Distribution Unit circuit diagram in Volume 2 of this
manual.
Fig 3-28: Typical power distribution unit (cover removed)
Description
Issue 1: August 07 Page 3-32 of 46 Printed: 07 August 2009 07:42
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