Oxford Instruments OpAL - Services

OpAL Oxford Instruments Plasma Technology Installation Data
6. Services
The required services are listed in the following sub-sections. For full details of services
specifications including connection diagrams, electrical connection schematic etc., read in
conjunction with the Oxford Instruments Plasma Technology ‘Services Specifications for
Plasmalab and Ionfab Systems’ document.
6.1 Electrical Supply requirement
Function Connection Parameter Specification
Voltage 208Vac ±10%
Current 32 A
Frequency 50 / 60 Hz
System electrical
supply (208V
system)
Cable (4 metres
long)
Phases 3 phase, N + E
Voltage 380Vac –10% to
415Vac +6%
Current 25 A
Frequency 50 / 60 Hz
System electrical
supply (415V
system)
Cable (4 metres
long)
Phases 3 phase, N + E
6.2 Water Cooling requirements
6.2.1 Lower Electrode
Function Connection Parameter Specification
Flow Min. 2 lpm (0.53
gpm (US))
Liquid cooled seals
for lower electrode
3
/8” stainless steel
Swagelok
Temperature As required by
process
6.3 Compressed Dry Air (CDA) requirement
Function Connection Parameter Specification
Flow 5 lpm (0.2 cfm)
(combined with gas
pod)
System CDA 6mm push-fit
Pressure 6.0 – 7.0 Bar
Flow 5 lpm (0.2 cfm)
(combined with
system)
Gaspod CDA 6mm push-fit
Pressure 4.0 – 6.0 Bar
Installation Data
Issue 3: October 08 Page 16 of 22 Printed: 7-Aug-09, 8:03