OpAL Oxford Instruments Plasma Technology System Manual
3.5.2 Precursor cabinet control panel
The control panel, shown in Fig 3-20, controls the bypass valves and N
2
purge gas
during the installation and removal of precursor pots. Each switch is lockable, requiring a
key to operate it.
Fig 3-20: Precursor cabinet control panel
3.6 Emergency off and Interlock facilities
Emergency off (EMO) and interlock facilities are provided to shut down the machine in an
emergency and to prevent processing until the system is fully prepared. The functions of
these facilities are described in the following sub-sections. Note that the circuit
implementation of these facilities is fully described in Section 7 as an aid to
troubleshooting.
3.6.1 Emergency off switch
An emergency off switch, with normally-closed contacts, is mounted on top of the
console. The switch is activated by pressing a 40 mm diameter red 'Emergency Off'
button.
When the switch is activated, its contacts open removing the 24V dc EMO supply to the
main input contactor, thus shutting down the entire machine.
An external EMO facility is provided at SK7 located on the power distribution unit. This
allows normally-closed contacts of external equipment (e.g. remote EMO switches,
exhaust scrubbers etc.) to be connected in series with the machine’s EMO switch. If this
facility is not used, pins D & A in SK7 must be shorted out by a link.
To reset the machine after EMO activation, refer to the procedure given in Section 5.
IMPORTANT
Where the rotary vane pump is powered from a mains supply separate from the OpAL
system, a separate 'Emergency Off' facility must be provided by the customer.
Description
Issue 1: August 07 Page 3-20 of 46 Printed: 07 August 2009 07:42
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