Installation Data Oxford Instruments Plasma Technology OpAL
Contents
Change record sheet
1. Introduction ........................................................................................................... 4
2. Installation information .......................................................................................... 5
2.1 Dimensions...................................................................................................... 5
2.2 Weights ........................................................................................................... 5
2.3 Heat load ......................................................................................................... 5
2.4 Sound level ...................................................................................................... 5
3. Installation diagrams .............................................................................................. 6
4. Services connections ............................................................................................ 13
5. Gas handling ........................................................................................................ 15
6. Services................................................................................................................ 16
6.1 Electrical Supply requirement ......................................................................... 16
6.2 Water Cooling requirements........................................................................... 16
6.2.1 Lower Electrode ......................................................................................... 16
6.3 Compressed Dry Air (CDA) requirement.......................................................... 16
6.4 Nitrogen requirement..................................................................................... 17
6.5 Process gas requirement ................................................................................ 17
6.6 Extraction requirement .................................................................................. 17
7. Pump set information ........................................................................................... 18
7.1 Rotary pump purging ..................................................................................... 18
8. Interlocks ............................................................................................................. 19
8.1 General description........................................................................................ 19
8.2 Gas box interlocks ......................................................................................... 21
8.2.1 Incompatible gases.................................................................................... 21
8.3 System LED Monitoring Table ......................................................................... 22
9. Precursor Information........................................................................................... 22
10. OIPT locations worldwide...................................................................................... 22
Fig 1: OpAL services........................................................................................................ 6
Fig 2: Front view ............................................................................................................. 7
Fig 3: Plan view ............................................................................................................... 8
Fig 4: Plan view with process chamber open .................................................................... 8
Fig 5: 3-D view with process chamber open .................................................................... 9
Fig 6: Console - rear view with dimensions ................................................................... 10
Fig 7: Console - rear view ............................................................................................. 11
Fig 8: Console – precursor cabinet rear view.................................................................. 12
Fig 9: Services connector locations ................................................................................ 13
Fig 10: Electrical connections ........................................................................................ 14
Fig 11: 8-Line gas pod .................................................................................................. 15
Fig 12: Gas box interlock chain ..................................................................................... 21
Table 1: Services connector identification...................................................................... 13
Installation Data
Printed: 7-Aug-09, 8:03 Page 3 of 22 Issue 3: October 08
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