Plasmalab and Ionfab Oxford Instruments Plasma Technology Health and Safety
Health and Safety
Issue 18: April 2010 Page 1-2 of 24 Printed:06 April 2010, 09:32
1.1 Introduction
This section must be read and understood before the system is approached or operated and
before any maintenance work is carried out.
ted
idance when operating the tool.
be impaired.
nsibility to
e
It is a requirement that procedures and practices taught in Oxford Instruments Plasma Technology
training courses are followed. If any user of the tool has not been directly trained by Oxford
Instruments Plasma Technology, please ensure that they understand the safety issues associa
with the tool, and that they consult relevant personnel for gu
If the equipment is used in a manner not specified by Oxford Instruments Plasma Technology, the
protection provided by the equipment may
It is the user's responsibility to ensure the system is operated in a safe manner. Consideration
should be made for all aspects of the system's lifecycle, including, handling, installation, normal
operation, maintenance, dismantling, decontamination and disposal. It is the user's respo
complete suitable risk assessments, to determine the magnitude of hazards, particularly when
using hazardous process gases and chemicals. The use of gas, chemical and fire detection
equipment, and gas pod monitoring equipment should be considered.
Please read this section carefully, and note that certain aspects of the system can produce mor
than one hazard (e.g. process gases can be a fire hazard and a toxic hazard).
Some safety features are fitted to guard against more than one hazard. In particular, note that
some view ports must guard against UV light emission (sub-section 1.4.3, page 1-7), RF energy
emission (sub-section 1.4.2, page 1-6) and must be fitted with implosion guards.
Note that this document is standardised and may contain warnings, which are not relevant to your
part
icular system.
1.1.1 Warnings and Cautions
Throughout this manual, WARNINGS are inserted in the text to draw the reader’s attention to
hazards. Failure to comply with a WARNING could result in death or serious injury. A typical
warning is shown below:
PICTORIAL SHOWING THE
HAZARD CATEGORY GRAPHICALLY
HAZARD IDENTIFICATION CONSEQUENCES OF IGNORING
THE HAZARD
HOW TO AVOID
THE HAZARD
WARNING
HAZARDOUS VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY OR BURNS
Any work requiring the removal of covers or panels must only be performed by authorised
personnel who are aware of the hazards involved.
Before removing any covers or panels, power down the system then carry out the lock out /
tag out procedure detailed in Section 6.
Throughout this manual CAUTIONS are inserted in the text to draw the reader’s attention to
situations and procedures, which could cause damage to the equipment.
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