OpAL Oxford Instruments Plasma Technology System Manual
3.13.3 Precursor manufacturers
Bubblers can be ordered from any of the major precursor manufacturers shown in the
following table.
Manufacturer Web address
Epichem www.epichem.com
Air Products (inc Schumacher and Akzo Nobel) www.airproducts.com
Sigma Aldrich (SAFC) www.sigmaaldrich.co
m
Air Liquide www.airliquide.com
Strem Chemicals www.strem.com
Table 3-6: Precursor manufacturers
Please note the above is not an exhaustive list as Oxford Instruments always recommends
you shop around to get the best deal on both price and delivery time, which varies
depending on the precursor you are ordering.
NOTE: Heater jackets are specific to the bubbler type fitted and have to be specified at
the time of order.
Description
Issue 1: August 07 Page 3-44 of 46 Printed: 07 August 2009 07:42
To Next Page
