Oxford Instruments OpAL - Operating Instructions; Introduction; Representation on the PC2000 Pages; Using the Ozone Delivery System in a Recipe

ALD Ozone Delivery System Oxford Instruments Plasma Technology
Equipment Manual
OPERATING INSTRUCTIONS
Printed: 14-Jul-10, 7:13
Page 5-2 of 4 Issue 01: July 10
5.1 Introduction
The ozone delivery system is controlled from the PC2000 application on the main system
controller.
5.2 Representation on the PC2000 pages
Figure 5-1 shows the panel used to control the delivery system.
Figure 5-1: Ozone panel
The panel contains the following controls and indicators:
O2 valve
Switches the oxygen supply to the ozone generator.
Ex valve
Switches ozone to the exhaust system.
CH valve
This fast ALD valve switches ozone to the ALD process chamber.
Status panel
Displays status messages.
Ozone generator ON/OFF field
Enter a 1 to turn the generator on. Enter a 0 to turn the generator off.
5.3 Using the ozone delivery system in a recipe
The ozone generator must be turned on from the PC2000 controller at least five minutes
before delivering ozone in a process step. This time period allows the ozone output of the
generator to optimise (see Figure 5-2).
If running a recipe, turn the ozone generator on during the first recipe step.
Figure 5-2: Ozone generator is turned on