OpAL Oxford Instruments Plasma Technology Installation Data
7. Pump set information
CAUTION
Where the rotary vane pump is powered from a mains supply separate from the OpAL
system, a separate 'emergency off' facility must be provided by the customer.
Available
pump options
Length
mm
Width
mm
Height
mm
Machine
connection
*Pump
outlet
connection
Weight
kg
Power
consumption
kW
Minimum N
2
purge rate
Alcatel 2063C2 819 264 397 DN 40 DN 40 98 2.2 (50Hz)
2.6 (60Hz)
2 litres/minute
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard stainless
steel. Refer to the OIPT Services Specifications document, sub-section 8.1.
** This figure applies only to the rotary vane pump; the roots blower does not require N2 purging.
For ALD precursors such as TMA, mineral oil A155 is to be used with the pump
7.1 Rotary pump purging
The requirements for rotary pump purging depend on the process used. Customers
should consult the pump manufacturer for their recommendations.
For Adixen 2063 rotary pumps, the recommended minimum N
2
purge rate is
2 litres/minute at a pressure of 2bar to 5bar. For highly corrosive or pyrophoric gases,
4 litres/minute is recommended.
Installation Data
Issue 3: October 08 Page 18 of 22 Printed: 7-Aug-09, 8:03
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