Health and Safety Oxford Instruments Plasma Technology Plasmalab and Ionfab
Health and Safety
Printed:06 April 2010, 09:32 Page 1-3 of 24 Issue 18: April 2010
A typic
al CAUTION is shown below:
CAUTION
Upper electrodes can become contaminated from finger marks etc.
re
worn.
When working on the upper electrodes, ensure that powder-free cleanroom gloves a
1.2 Service mode
Service mode allows parts of the system to be operated without some of the interlocks that ar
present in other operating modes. For example in service mode the loadlock end-effector can be
moved with the chamber lid open
e
. Take additional care when operating the equipment in service
mode to avoid personal injury or damage to the equipment.
ealth and Safety which appear in the text of this
manual and in this section will fall into the following categories:
(sub-section 1.4.1,
page 1-5)
ical power supply is isolated, electrical
nergy at dangerous levels is stored by capacitors.
gnetic
section 1.4.2,
page 1-6)
adiation can have a field strength strong
nough to cause death or injury if not properly shielded.
(sub-section 1.4.3,
page 1-7)
nent damage to the eyes or blindness if not protected
y the relevant shields or filters.
-section1.4.4,
page 1-8)
ome components run at a temperature high enough to cause severe
burns.
(sub-section 1.4.5,
page 1-8)
very low
temperatures can cause severe
urns' if allowed to contact the skin.
(sub-section 1.4.6,
page 1-9)
ases under pressure can, if applied to the body,
nter it and cause death or serious injury.
(sub-section 1.4.7,
ome precursors may be tox
ic, corrosive, carcinogenic or flammable.
(sub-section 1.4.8,
page1-12)
t
th and
ation.
1.3 Hazard Categories
Hazards and associated warnings relevant to H
a) Electrical
b) E
The system carries voltages high enough to cause death or serious
injury. Even w
hen the electr
e
Parts of the system produce electromagnetic radiation from audio
frequencies to 2.45 GHz. This r
lectroma
Radiation
(sub-
e
c) Light
Ultra Violet (UV) or Laser light may be emitted in some systems. These
can cause perma
b
d) High
Temperature
(sub
S
e) Low
Temperature
Components and gases at
'b
f) Gases
Some process gases and cleaning fluid vapour may be tox
ic, corrosive,
carcinogenic or flammable. They may also cause asphyxiation through
oxygen deprivation. G
e
g) Precursors
page1-11)
S
h) Mater
ials
Some materials used in the system can become tox
ic during use. If this
happens, then great care must be taken during maintenance to preven
death or serious injury.
Some processes may generate nanoparticles; particles whose sizes
range from 1 to 100 nm. The effect of these particles on the health and
safety of personnel and the environment is currently unknown. Follow
local and national safety procedures to alleviate any risk.
If a new process is considered and new materials may result, please
consult Oxford Instruments Plasma Technology for further heal
afety informs
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