Plasmalab and Ionfab Oxford Instruments Plasma Technology Health and Safety
Health and Safety
Issue 18: April 2010 Page 1-4 of 24 Printed:06 April 2010, 09:32
i) Process Chemicals
(sub-section 1.4.9,
page 1-15)
system.
n using such
hemicals.
(sub-section 0, page
1-15)
tial vacuum represent stored
nergy, w
hich can cause injury if released carelessly.
(sub-section 1.4.11,
page 1-16)
s
an be actuated
uddenly, even w
hen the system is not operating, causing serious injury.
(sub-section 0, page
1-16)
ponents,
on 1.4.13,
page 1-17)
Health and Safety standards.
Some etching and deposition compounds are tox
ic during use, and can
leave toxic residues in the
Some non-plasma cleaning processes, for example wet cleaning, may
involve the use of toxic or harmful chemicals. Ensure that local and
national health and safety procedures are followed whe
c
Chambers or other components under par
j) Vacuum
e
k) Compressed
Air
Compressed air can enter the body through the skin and cause seriou
injury. Pneumatically operated system components c
s
Injury can be caused by heavy components, sprung com
l) Mechanical
deposition layers under stress, embrittled w
ire and machinery in motion.
Some mechanical cleaning processes may generate dust or very small
particles, which may be toxic or harmful. Ensure that local and national
ealth and safety procedures are followed when performing mechanical h
cleaning procedures.
Various procedures must be studied and follow
ed. These include
procedures specific to the system in question and also local and national
m)
General
(sub-secti
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