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Fig 5-19: Leak Detection page
The leak detection page, accessed from the Chamber 1 process page by selecting the Leak
Detection button, allows you to perform automatic or manual leak detection runs.
The Leak Detection page can be used to check the rate-of-pressure rise in a sealed process
chamber. The chamber is first pumped for a fixed time. The chamber then seals and the
pressure rise rate is calculated. A graph of the chamber pressure against time is plotted. The
test stops either when the test time elapses. The chamber is returned to pumping at the end
of the test.
The rate-of-pressure rise will depend on:
a) The leak rate from atmosphere. Leaks are not improved by more pumping.
b) The outgassing rate from all surfaces.
c) The ‘virtual leak’ rate from parts of the system furthest from the vacuum pump,
especially gas feed pipes.
Outgassing and virtual leaks are reduced by more pumping. Outgassing is increased if the
temperature of the whole system is raised.
The facilities available on this page are:
Page function title
field
Displays the current function of the page, i.e. Leak Detection
Process chamber
message field
Displays context related messages about the process chamber.
Operating Instructions
Printed: 06 November 2007 09:42 Page 5-51 of 60 Generic (OpAL Plasma) Issue 1: Oct. 07
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