Oxford Instruments OpAL - Nitrogen Requirement; Process Gas Requirement; Extraction Requirement

Installation Data Oxford Instruments Plasma Technology OpAL
6.4 Nitrogen requirement
Function Connection Parameter Specification
Flow 10 lpm (0.4 cfm) System N
2
¼” stainless steel
Swagelok
Pressure 3.0 Bar (45 psi)
minimum
Rotary pump purge ¼” stainless steel
Swagelok typically
Flow Refer to sub-
section 6.1 Rotary
pump purging
Pressure Refer to sub-
section 6.1 Rotary
pump purging
Flow (set at
rotameter)
1 lpm (0.04 cfm) Glove box purge ¼” stainless steel
Swagelok (fed from
System N
2
)
Pressure 3.0 Bar (45 psi)
minimum
6.5 Process gas requirement
Function Connection Parameter Specification
Process gas in
(includes purge
and bubbler gases)
¼” stainless steel
welded pipe at
gaspod
¼” stainless steel
VCR at system
Pressure 2.0 – 3.0 Bar (30 –
45 psi)
6.6 Extraction requirement
Function Connection Parameter Specification
Gaspod 100mm (4”) tube Flow 8-line gas pod – 3
m
3
/hour (1.8 cfm)
Rotary pump
exhaust
Refer to Section 6
Pump set
information
Installation Data
Printed: 7-Aug-09, 8:03 Page 17 of 22 Issue 3: October 08