Oxford Instruments OpAL - Heater PLC

OpAL Oxford Instruments Plasma Technology System Manual
Description
Issue 1: August 07 Page 3-18 of 46 Printed: 07 August 2009 07:42
3.4.4.1 Heater PLC
The heater PLC, shown in Fig 3-18, controls all heaters except the grounded electrode.
The PLC incorporates a dedicated PID, which can control up to 16 temperature zones.
2003 Analog input
module
PC 2003
Base Unit
CANBUS
connector
B&R 3-slot
backplane 2003
PC 2003 DIG I/O
card
Fig 3-18: Heater plc