Installation Data Oxford Instruments Plasma Technology OpAL
2. Installation information
2.1 Dimensions
Dimensions of the system are given in Fig 1, Fig 2, Fig 3, Fig 4 and Fig 6. Gas handling
component dimensions are given in Fig 11. Pump dimensions are given in Section 7.
2.2 Weights
Typical weights of system components:
Console: 250 kg
8-line Gas pod: 50 kg
12-line Gas pod: 70 kg
Pump: See Section 7 (Pump set information).
2.3 Heat load
The typical heat load for the clean room installation is:
Operating: 5 kW (includes chamber, electrode, precursors)
Passive: 3 kW
Note that these specifications do not include externally sited components, e.g. pumps,
transformers, etc..
2.4 Sound level
Typical sound levels (measured 500mm above the dry pump): 75dB
Installation Data
Printed: 7-Aug-09, 8:03 Page 5 of 22 Issue 3: October 08
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