OIPT Systems Oxford Instruments Plasma Technology System Manual
1. Introduction
This document gives the specifications of the services required for the Plasmalab and Ionfab
systems. For details of cooling flow rates and electrical supply ratings, see the relevant
system installation data sheets.
Customers must ensure that the services as specified are available at the time of delivery
to reduce system commissioning time and potential problems.
Unless other arrangements have been made in writing with Oxford Instruments Plasma
Technology (OIPT), it is a requirement that services meet the following specifications. If
they do not meet these specifications then the system warranty and process guarantees
may be made invalid.
If you suspect that you may fail to meet ANY of these specifications, please contact
Oxford Instruments Plasma Technology (OIPT) immediately so that we can discuss the
problem with you.
Oxford Instruments Plasma Technology (OIPT) conducts a programme of continual
product development, and reserves the right to change the design and/or specification of
equipment without notice. The details contained in this document were correct at the
time of printing but should be confirmed immediately prior to delivery.
WARNING
BEFORE INSTALLING THE SERVICES REQUIRED FOR OIPT SYSTEMS, ENSURE THAT ALL
RELEVANT ASPECTS OF HEALTH AND SAFETY ARE FULLY UNDERSTOOD.
HEALTH AND SAFETY GUIDANCE AND INSTRUCTIONS ARE GIVEN IN SECTION 1 OF ALL
OUR SYSTEM USER MANUALS. THIS DOCUMENT IS AVAILABLE IN ENGLISH, FRENCH,
GERMAN AND JAPANESE.
Services Specifications
Issue 21: January 10 Page 4 of 22 Printed: 6-Jan-10, 8:53
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