Oxford Instruments OpAL - Total Loss Cooling

OIPT Systems Oxford Instruments Plasma Technology System Manual
2.2 Total Loss Cooling
Municipal (drinking) water may be used in total loss cooling of the system in situations
where clean water is freely available, but only if the water meets the specification in sub-
section 2.2.1. In case of any doubt, obtain the water specification from the water utility
c
ompany, and consult with OIPT. It is not practical to use total loss cooling where the
water temperature is critical.
PLASMALAB
OR
IONFAB
SYSTEM
ISOLATION
VALVES
FILTER
10 MICRON FULL FLOW
TOTAL WATER FLOW
METER OF APPROPRIATE
RANGE
DRAIN
Fig 2.2: Recommended basic total loss installation
Services Specifications
Issue 21: January 10 Page 8 of 22 Printed: 6-Jan-10, 8:53