OpAL Oxford Instruments Plasma Technology System Manual
Preface
This manual is the OPERATION and MAINTENANCE MANUAL. It provides all the
information necessary for the operation and routine maintenance of the system. Certain
components within the system are supplied by other manufacturers. These components
have their separate manuals which are included, and should be referred to for detailed
operation, maintenance and repair information.
WARNING
SERVICE BY
QUALIFIED STAFF
ONLY
Refer to manual
Where this label is displayed (black text on a yellow
background), read the relevant manual before proceeding
to operate or maintain the labelled equipment.
Customer Support Facilities
Oxford Instruments Plasma Technology has global Customer Support Facilities to provide
a co-ordinated response to customer’s queries. All queries are recorded on our Support
Database and dealt with as quickly as possible. If we are not able to answer the query
immediately, we will contact you as soon as possible.
Before contacting a Customer Support Facility, please ensure that you have referred to the
appropriate section of your system manual, OEM manuals and electrical drawings.
Please direct all queries through your nearest support facility (see below) and have the
following details available.
System Type, e.g. OpAL etc.
Works Order No. – This can be found on the front cover of your system manual.
Contact Information – Your name, Company and how we can contact you.
Details of your query – nature of the problem, part numbers of spares required, etc.
You can contact us via any of the following:
China
Beijing
Tel: +86 106518 8160
Email: pt.support@oichina.cn
Shanghai
Tel: +8621 6360 8530
Email: pt.support@oichaina.cn
Germany
Tel: +49 6122 937 161
Email: plasma@oxford.de
Japan
Tel: +81 3 5245 3591
Email: oikkpt@oxinst.co.jp
Singapore
Tel: +65 6337 6848
Email: pt.support@oxford-instruments.com.sg
Taiwan
Tel: +886 3 5788696
Email: pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0) 1934 837070
(0800 – 2000 UK local time)
Fax: +44(0) 1934 837071
Email: pt.support@oxinst.co.uk
USA
Oxford Instruments Inc.
300 Baker Avenue, Suite 150
Concord, MA 01742
Phone: +1 978-369-9933
Toll Free: +1 800-447-4717
Fax: +1 978-369-8287
Email: pt.usa@oxinst.com
Preface
Printed: 14 July 2010 08:52 Page (iv) Issue 1: July 2010
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