OpAL Oxford Instruments Plasma Technology System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
6.3 Process chamber
WARNING
BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE PROCESS
CHAMBER, IT MUST BE SUBJECTED TO AT LEAST TWO VENT CYCLES
SUBSEQUENT TO A PROCESSING RUN.
HEATED TABLES MUST BE ALLOWED TO COOL TO ROOM TEMPERATURE
BEFORE CLEANING THE CHAMBER WITH SOLVENTS.
CRYOGENICALLY COOLED TABLES MUST BE BROUGHT TO ROOM
TEMPERATURE BEFORE MAINTENANCE WORK.
6.3.1 Monthly
1) Visually examine the interior of the chamber for contamination. Any necessary
cleaning should be carried out using a lint-free cloth moistened with Isopropyl
Alcohol (IPA). Tougher deposits can be removed using an abrasive pad first.
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE
IT NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
2) Examine the exterior of the chamber and its fittings for damage.
3) Examine the lid and seals for any damage or deterioration.
4) Examine the heating/cooling water flow system (outside and inside the machine
covers) for signs of leakage.
5) Purge the process chamber for thirty minutes with dry nitrogen if IPA has been
used for cleaning.
6) Inspect the chamber gas springs for signs of wear and damage. Check that the
gas springs operate correctly.
6.3.2 Annually
1) Exchange the chamber and loadlock gas springs for new ones.
Maintenance
Issue 4: July 10 Page 6-6 of 16 Printed: 14-Jul-10, 8:14
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