OpAL Oxford Instruments Plasma Technology System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
CAUTION
Because the diaphragm in the gauge is thin tensioned metal, it can be
destroyed
by sudden changes in temperature or by clumsy handling.
4) Re-install the gauge, allowing sufficient time for outgassing of the cavity and
diaphragm prior to operation.
NOTE: See manufacturer's literature for calibration adjustments.
6.6 Gas handling system
WARNING
BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE GAS HANDLING
SYSTEM, ELECTRICALLY ISOLATE THE SYSTEM BY SWITCHING OFF AND
LOCKING OFF THE WALL-MOUNTED SAFETY ISOLATION BOX. PROCESS
GASES USED MAY BE TOXIC OR FLAMMABLE. ADOPT THE CORRECT
PROCEDURES WITH REGARD TO PURGING BEFORE REMOVING OR LOOSENING
COMPONENTS CARRYING THESE GASES. WEAR PROTECTIVE CLOTHING.
6.6.1 Wall-mounted gas pod
6.6.1.1 Annually
Ensure the gas pod and its fixings are secure.
IMPORTANT: OIPT gas pods typically weigh >40kg. Ensure the wall and gas pod
fixings are sturdy enough to bear at least four times the weight of the gas pod.
6.6.2 Mass flow controllers (MFC)
6.6.2.1 Annually (or as necessary)
If an MFC needs cleaning, repair or recalibration:
1) Make sure MFC has been thoroughly purged before removal.
2) Discuss with the vendor the return of the MFC for service work. Inform the
vendor if hazardous gases have been used.
Maintenance
Issue 4: July 10 Page 6-8 of 16 Printed: 14-Jul-10, 8:14
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