System Manual Oxford Instruments Plasma Technology OpAL
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
6.7 Pumping system
WARNING
BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE PUMPING SYSTEM,
THE PROCESS CHAMBER MUST BE SUBJECTED TO AT LEAST TWO MANUALLY
CONTROLLED VENT CYCLES SUBSEQUENT TO ANY RUN WHERE CORROSIVE,
TOXIC OR INFLAMMABLE (FLAMMABLE) PROCESS GASES HAVE BEEN USED.
THE SYSTEM MUST THEN BE ELECTRICALLY ISOLATED (SWITCHED OFF ).
CAUTION
When changing or topping-up the lubricating oil in a pump, always use oil
of the same brand and type. If a change of brand or type is contemplated,
refer to Oxford Instruments Plasma Technology for advice.
6.7.1 Exhaust filter with oil feedback and chemical filter
6.7.1.1 Weekly
Inspect the filter differential pressure indicator (if fitted) and change the filter cartridge if
necessary. If perfluoropolyether (PFPE) oil is used in the pump, change the filters when
the oil becomes cloudy.
WARNING
HAZARDOUS SUBSTANCES MAY ESCAPE FROM THE FILTER AND OIL. TAKE
SUITABLE PRECAUTIONS SUCH AS WEARING GLOVES, GOGGLES OR GAS
MASK.
6.7.1.2 During an oil change
Always change the filters when the oil is changed. Note that the oil trapped in the filter
cartridge housing must also be drained and re-filled.
6.7.2 Rotary vane pumps
6.7.2.1 Weekly
Inspect the oil level. If the level is low, switch off the system and replenish.
6.7.2.2 Bi-weekly (or at 400 hours operating time)
Inspect the quality of the oil visually, chemically and with regard to its viscosity (see
manufacturer's literature) to establish its rate of deterioration for a given process. Once
this has been established, the oil should be changed regularly at that frequency, but
never less frequently than every 2000 hours. Always change the oil filters when the oil is
changed.
Maintenance
Printed: 14-Jul-10, 8:14 Page 6-11 of 16 Issue 4: July 10
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