Oxford Instruments OpAL - System component locations

OpAL Oxford Instruments Plasma Technology System Manual
3.2 System component locations
This sub-section contains illustrations of the OpAL console showing the locations of major system
components.
3.2.1 Console/base unit mechanical assembly
The system console/base unit is shown in Fig 3-1 (based on drawing G-MA71A30090).
The unit comprises two major frames:
Main frame – houses all system components, e.g. services panel, power box, control
panel, etc.
Precursor unit frame – houses all precursor components, e.g. control panel, valves,
pipework, etc.
Main frame
Precursor
unit frame
Services
panel
Fig 3-1: System frame
Description
Issue 1: August 07 Page 3-4 of 46 Printed: 07 August 2009 07:42