Plasmalab and Ionfab Oxford Instruments Plasma Technology Health and Safety
Health and Safety
Issue 18: April 2010 Page 1-8 of 24 Printed:06 April 2010, 09:32
1.4.4 High Temperature
WARNING
HOT SURFACES - CLOSE CONTACT CAN CAUSE SERIOUS INJURY AND BURNS
t maintenance.
Allow sufficient time for heated components (e.g. heated lower electrodes) to cool to room
temperature before carrying ou
1.4.4.1 During operation of the system some components can become dangerously hot. Alway
allow time for these to cool to a safe temperature before han
s
dling them.
s,
igh temperatures.
temperatures.
Low Temperature
Components that become hot include electrically heated chambers, chamber liner
lower electrodes, specimen holders and halogen lamps. Items illuminated by halogen
lamps can also reach very h
Note that items such as neutralizers, ion sources, and ICP sources operate at high
1.4.5
WARNING
COLD OBJECTS - CONTACT CAN CAUSE SERIOUS INJURY TO THE SKIN AND CAN CAUSE
HE SKIN TO ADHERE TO THE COLD OBJECT
e.g. cryogenically cooled lower electrodes) to
eturn to room temperature before carrying out maintenance.
If cold objects must be handled, ensure that suitable protective clothing is worn.
T
Allow sufficient time for cold components (
r
Beware of the extreme cold produced in refrigerated or cryogenically cooled systems.
Contact with the skin by components at these temperatures can produce 'burns'. Allow
the cooling system to reach a safe temperature before attempting any maintenance
1.4.5.1
ogenically cooled lower electrodes, cryogenic
pumps and components that use liquid nitrogen.
tasks.
Components that become cold include cry
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