Oxford Instruments OpAL - Operating Instructions

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5
Operating instructions..........................................................................................5-1
5.1 Introduction ......................................................................................................5-3
5.1.1 Controls and indicators............................................................................................5-3
5.1.2 PC 2000 Software Overview....................................................................................5-4
5.2 System power-up..............................................................................................5-5
5.3 Shutting the system down in an emergency .................................................5-6
5.4 System shut down and restart ........................................................................5-6
5.4.1 Emergency shut down .............................................................................................5-6
5.4.2 Routine shut down...................................................................................................5-6
5.4.3 Mains Power failure.................................................................................................5-6
5.4.4 Software abort.........................................................................................................5-6
5.4.5 System shut-down procedure..................................................................................5-7
5.4.6 System restart following an emergency stop, power failure, or software abort5-8
5.4.7 System response to loss of services.........................................................................5-8
5.5 Opening and closing the process chamber...................................................5-10
5.6 Operator control.............................................................................................5-11
5.6.1 Turning screen savers and power saver options off............................................5-11
5.6.2 Logging on .............................................................................................................5-12
5.6.2.1 Editing users details ...............................................................................5-12
5.6.3 System alerts...........................................................................................................5-15
5.6.4 Visual and audible warnings (if fitted).................................................................5-16
5.6.5 Using PC 2000 software.........................................................................................5-17
5.6.6 Pumping the system down....................................................................................5-18
5.6.7 Venting the system ................................................................................................5-19
5.6.8 Manual process run................................................................................................5-19
5.6.9 Automatic process run...........................................................................................5-20
5.6.10 Single button automatic process run..................................................................5-21
5.6.11 Production mode..................................................................................................5-22
5.7 Creating and editing recipes .........................................................................5-23
5.7.1 Working with recipe steps.....................................................................................5-24
5.7.2 Working with recipes.............................................................................................5-25
5.8 Process Datalog...............................................................................................5-27
5.8.1 Select Log page......................................................................................................5-27
5.8.1.1 Saving a log file as text for use in Microsoft Excel™...........................5-28
5.8.2 Run log page..........................................................................................................5-31
5.8.3 Leak detection and MFC calibration log page.....................................................5-32
5.9 Operator adjustments ....................................................................................5-33
5.9.1 Adjusting the N
2
outlet pressure to the system...................................................5-33
5.9.2 Manually controlled valve with outlet pressure gauge ......................................5-33
5.9.3 Rotary/dry pump N
2
purge flow rate adjustment................................................5-34
5.10 PC 2000 Software Reference..........................................................................5-35
5.10.1 Pump Control Page..............................................................................................5-35
5.10.2 Service mode page...............................................................................................5-38
5.10.2.1 Exiting from service mode.....................................................................5-39
5.10.3 ALD Heater Presets page.....................................................................................5-40
5.10.3.1 Autotune zone heaters..........................................................................5-40
5.10.4 System Log page ..................................................................................................5-42
5.10.5 Recipe page..........................................................................................................5-43
5.10.6 Production mode page........................................................................................5-45
5.10.7 Chamber 1 Process Control page........................................................................5-46
5.10.8 Leak Detection page............................................................................................5-51
5.10.9 Mass flow calibration page.................................................................................5-53
5.10.10 Tolerances page .................................................................................................5-54
Operating Instructions
Printed: 06 November 2007 09:42 Page 5-1 of 60 Generic (OpAL Plasma) Issue 1: Oct. 07