Oxford Instruments OpAL - Page 73

System Manual Oxford Instruments Plasma Technology OpAL
The heat
er zones are controlled from the PC 2000 software; a typical heater presets page
is shown in Fig 3-17.
Fig 3-17: Heater Presets page
Description
Printed: 07 August 2009 07:42 Page 3-17 of 46 Issue 1: August 07