ALD Ozone Delivery System Oxford Instruments Plasma Technology
Equipment Manual
OPERATING INSTRUCTIONS
Printed: 14-Jul-10, 7:13
Page 5-1 of 4 Issue 01: July 10
5 Operating Instructions
5
Operating Instructions............................................................................................................ 5-1
5.1 Introduction........................................................................................................................5-2
5.2 Representation on the PC2000 pages..................................................................................5-2
5.3 Using the ozone delivery system in a recipe ........................................................................5-2
5.4 Faults .................................................................................................................................5-3
5.4.1 Fault displayed on the PC2000 page.............................................................................5-3
Figure 5-1: Ozone panel ................................................................................................................5-2
Figure 5-2: Ozone generator is turned on ......................................................................................5-2
Figure 5-3: Fast ALD valve is open .................................................................................................5-3
Figure 5-4: A fault in the ozone delivery system ............................................................................5-3
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