ALD Ozone Delivery System Oxford Instruments Plasma Technology
Equipment Manual
INSTALLATION
Printed: 14-Jul-10, 7:11
Page 4-4 of 4 Issue 01: July 10
Perform the following steps to adjust the needle valve:
1) Open the cabinet door.
2) Rotate the control knob on the needle valve fully clockwise to close it.
3) Close the cabinet door.
4) Access the PC2000 application on the main system controller.
5) Evacuate the ALD chamber and leave the system pumping.
6) Open the ALD dose valve from the PC2000 application.
7) Note the chamber pressure indicated on the PC2000 Pumping page.
8) Open the cabinet door.
9) Rotate the control knob on the needle valve slightly counter-clockwise.
10) Close the cabinet door and wait until the indicated chamber pressure is stable.
11) Repeat steps 8) to 10) until the chamber pressure is 30 mTorr (for a FlexAL system)
or 75 mTorr (for an OpAL system).
Perform the following steps to prepare the ozone delivery system for use:
1) Access the PC2000 application on the main controller.
2) Stop the ozone generator and close the ALD valve.
3) Open the cabinet door and switch the “Power” knob on the control panel of the
ozone generator to the “On” position.
4) Close the cabinet door.
5) The ozone generator is now ready for use.
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