Oxford Instruments OpAL - Page 335

ALD Ozone Delivery System Oxford Instruments Plasma Technology
Equipment Manual
INSTALLATION
Printed: 14-Jul-10, 7:11
Page 4-3 of 4 Issue 01: July 10
4.2 Commissioning
4.2.1 Initial power-up
When electrical power is first connected to the cabinet, the ozone monitor unit displays a
high alarm reading for between 30 and 60 minutes. This is normal behaviour. Do not attempt
to use the ozone delivery system until the high alarm has disappeared.
If electrical power to the system is interrupted for less than 5 minutes, the ozone monitor will
only require around 5 minutes to warm up. If electrical power is interrupted for more than
five minutes, the high alarm reading may persist for between 30 and 60 minutes.
4.2.2 Initial set-up procedure
Perform the following steps to adjust the pressure regulator:
1) Open the cabinet door.
2) Switch the “Power” knob on the control panel of the ozone generator to the
“Off” position.
3) Rotate the control knob on the pressure regulator fully clockwise.
4) Close the cabinet door, to enable the interlock switch
5) Turn on the ozone generator from the process page on the main system PC2000
application. This opens the ozone isolation valves. The ozone generator will not
activate as it is switched off.
6) Open the cabinet door.
7) Turn the control knob on the pressure regulator one quarter-turn counter-
clockwise
8) Close the cabinet door and note the pressure displayed on the regulator display.
9) Repeat steps 6) to 8) until the regulator displays a value 0.5 bar above atmospheric
pressure.
Perform the following steps to adjust the rotameter:
1) Note the flow rate on the rotameter inside the cabinet.
2) Open the cabinet door.
3) If the flow rate is greater than 0.1 slpm, rotate the control knob on the rotameter
a small amount clockwise.
4) If the flow rate is less than 0.1 slpm, rotate the control knob on the rotameter a
small amount counter-clockwise.
5) Close the cabinet door and wait several seconds until the flow rate through the
rotameter is stable.
6) Repeat steps 2) to 5) until the flow rate through the rotameter is 0.1 slpm.