ALD Ozone Delivery System Oxford Instruments Plasma Technology
Equipment Manual
INSTALLATION
Printed: 14-Jul-10, 7:11
Page 4-2 of 4 Issue 01: July 10
4.1 Installation
If the Ozone Delivery System is supplied with a FlexAL system, the cabinet is mounted on the
FlexAL system frame (see Figure 4-1).
Figure 4-1: Mounting the cabinet on a FlexAL system
If the Ozone Delivery System is supplied with an OpAL system, the cabinet is mounted on a wall
(see Figure 4-2).
Figure 4-2: Mounting the cabinet on a wall
Refer to section 2 of this manual for a description of the required services.
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